I want to update Params of 3 level of inner object with
entityParameters

List<Param> entityParameters

var filter = Builders<MachineObj>.Filter.Eq(x => x.MachineId, id);

 filter &= Builders<MachineObj>.Filter.ElemMatch(x => x.Machines, inner =>
                 inner.MachineId == id2 && inner.Machines.Any(innerInner => innerInner.MachineId == id3
                 && innerInner.Params.Any(ip => entityParameters.Any(ep => ep.ParamId == ip.ParamId)))
    
update = Builders<MachineObj>.Update.Combine(update, Builders<MachineObj>.Update
                      .Set(x => x.Machines.FirstMatchingElement().Machines.FirstMatchingElement().Params, entityParameters)
                  );